Mission of the MicroRobotics group

Our mission is to develop efficient and very flexible tools for micro- and nanotechnology. In the future, the market for nano-fabricated devices and nano-electronics and new ultrathin displays is widely considered to be huge. We want already today to offer tools that are very easy to use that can help to develop these future devices.

Our group has considerable knowledge about design and fabrication of piezoceramic stick-slip actuators that are capable of a few nm resolution and several mm/s speed at virtually infinite range. Our devices are easy to mass fabricate and could be sold at a very competitive price. Furthermore those devices can easily be further miniaturized.

Research activities of the MicroRobotics group

Domains of research:

>> Stepping principles
>> Piezo actuator configurations
>> Manipulators for nanotechnology inside Scanning Electron Microscope (SEM)
>> Manipulators for biotechnology and manipulation under optical microscope
>> Mobile robots for micro manipulation
>> Driving electronics for piezo actuators
>> Sensors for high precision positioning